Method and apparatus for aligning diffraction grating

Details Method and apparatus for aligning diffraction grating Method and apparatus for aligning diffraction grating

2006-04-18

2006-04-18

Lauchman, Layla G. (Department: 2877)

Optics: measuring and testing

By alignment in lateral direction

C356S139040

Reexamination Certificate

active

07030983

ABSTRACT:
A method and an apparatus for aligning the longitudinal direction of grooves of a diffraction grating to a predetermined direction. The method and apparatus detect a diffracted light pattern sent from the diffraction grating, and displace the diffraction grating such that the direction of an arranging direction obtained from the diffracted light pattern is aligned in the predetermined direction.

REFERENCES:
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patent: 4776696 (1988-10-01), Hettrick et al.
patent: 5231461 (1993-07-01), Silvergate et al.
patent: 6023330 (2000-02-01), Marshall et al.
patent: 6118119 (2000-09-01), Ruschin
patent: 6411382 (2002-06-01), Nishina

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