Method and apparatus for aligning a substrate on a stage

Details Method and apparatus for aligning a substrate on a stage Method and apparatus for aligning a substrate on a stage

2006-09-19

2006-09-19

Epps, Georgia (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

C250S559330, C901S047000

Reexamination Certificate

active

07109510

ABSTRACT:
A method for aligning a workpiece may include determining a first and second position of a first edge of the workpiece based on a first and a second position of a pickup device. The workpiece may be aligned based on the first and second position of the pickup device. The at least first and second positions of the pickup device may be determined based on an intersection of a laser beam and the workpiece.

REFERENCES:
patent: 5783834 (1998-07-01), Shatas
patent: 6226087 (2001-05-01), Blaesing-Bangert
patent: 6342705 (2002-01-01), Li et al.
patent: 6624433 (2003-09-01), Okumura et al.
patent: 6806484 (2004-10-01), Steketee et al.
patent: 2001/0017939 (2001-08-01), Yoshida

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