Method and apparatus for aerial image analyzer

Details Method and apparatus for aerial image analyzer Method and apparatus for aerial image analyzer

1994-03-09

1997-05-20

Pham, Hoa O.

Optics: measuring and testing

Lamp beam direction or pattern

355 53, 355 68, G01J 142, G03B 2742

Patent

active

056317310

ABSTRACT:
A method and apparatus to analyze the aerial image of an optical system using a subwavelength slit. A slit configuration yields a higher signal-to-noise ratio than that achievable with a round aperture. The slit also allows the polarization of the aerial image to be analyzed. In an alternative embodiment a tunneling slit is used. The tunneling slit comprises an optically transparent ridge-like structure mounted to a substrate, the combined structure covered by a thin, planar metal film.

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