Method and apparatus for adjusting the volume of replenishment f

Details Method and apparatus for adjusting the volume of replenishment f Method and apparatus for adjusting the volume of replenishment f

1991-09-30

1993-02-23

Wintercorn, Richard A.

354324, G03D 1300

Patent

active

051894564

ABSTRACT:
A processor has switches that detect events during operation of the processor and provide signals to a microprocessor which controls operation of the processor. A replenishment system for a processing fluid includes a pump that provides replenishment fluid to a chamber. The processor control is changed to a calibration mode of operation and the switches are used to determine the volume of fluid provided by the pump during one cycle of operation of the replenishment system, and then, if necessary, to adjust the time the pump is operated to increase or decrease the volume of fluid delivered during one cycle of operation.

REFERENCES:
patent: 4021832 (1977-05-01), Krehbiel et al.
patent: 4104670 (1978-08-01), Charnley et al.
patent: 4222657 (1980-09-01), Leuchter
patent: 4293211 (1981-10-01), Kaufmann
patent: 4556305 (1985-12-01), Osegowitsch
patent: 4999660 (1991-03-01), Wright

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