Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth with a subsequent step acting on the...
Reexamination Certificate
2005-05-17
2005-05-17
Norton, Nadine G. (Department: 1765)
Single-crystal, oriented-crystal, and epitaxy growth processes;
Processes of growth with a subsequent step acting on the...
Reexamination Certificate
active
06893498
ABSTRACT:
In one embodiment, lithium oxide concentration in wafers is adjusted by placing the wafers in a vessel. Vapor of a lithium oxide source is provided and absorbed by the wafers, thereby adjusting the lithium oxide concentration in the wafers. In another embodiment, a two-phase lithium-rich source is placed between wafers such that space in the process chamber is efficiently utilized. In another embodiment, the wafers to be processed are placed in a section of a process chamber (e.g., process tube). Lithium oxide is introduced on end of the process chamber. Carrier gas is also introduced on that end of the process chamber to carry the lithium oxide into the section of the process chamber where the wafers are located. By adjusting the partial pressure of lithium oxide in the process chamber, the rate at which lithium oxide is absorbed by the wafers is controlled.
REFERENCES:
patent: 4071323 (1978-01-01), Holman
patent: 4071396 (1978-01-01), Holman
patent: 4196963 (1980-04-01), Chen et al.
patent: 4725330 (1988-02-01), Holmes et al.
patent: 5204314 (1993-04-01), Kirlin et al.
patent: 5726480 (1998-03-01), Pister
patent: 6195197 (2001-02-01), Gopalan et al.
patent: 6211999 (2001-04-01), Gopalan et al.
patent: 6319430 (2001-11-01), Bordui et al.
patent: 6652644 (2003-11-01), Miller et al.
Robert L. Holman and Richard M. Fulrath, “Intrinsic nonstoichiometry in the lead zirconate-lead titanate system determined by Knudsen effusion”, Appl. Physics, pp. 5227-5236, vol. 44, No. 12, Dec. 1973; University of California, Berkeley, California.
Robert L. Holman, “Novel uses of the thermo-microbalance in the determination of nonstoichiometry in complex oxide systems”, J. Vac. Sci. Technology, pp. 434-439, vol. 11, No. 1, Jan./Feb. 1974; Xerox Rochester Research Center, Rochester, New York.
T.R. Ranganath and S. Wang, “Suppression of Li20 out-diffusion from Ti-diffused LiNbO3 optical waveguides”, Appl Physics Letter, pp. 376-379, vol. 30, No. 8, Apr. 15, 1977; University of California, Berkeley, California.
Shintaro Miyazawa, et al., “A simple technique for suppressing Li2O out-diffusion in Ti:LiNbO3 optical waveguide”, Appl Physics Letter, pp. 742-744, vol. 31, No. 11, Dec. 1, 1977; Paris, France.
R. L. Holman, et al., “Chemical control of optical damage in lithium niobate”, Appl. Physics Letter, pp. 280-283, vol. 32, No. 5, Mar. 1, 1978; Webster Research Center, Xerox Corp., Rochester, New York.
Bor-Uei Chen and Antonio C. Pastor, “Elimination of Li2O out-diffusion waveguide in LiNbO3 and LiTaO3”, Appl Physics Letters, pp. 570-571, vol. 30, No. 11, Jun. 1, 1977; Hughes Research Laboratories, Malibu, California.
V. Ya Shur, et al., “Polarization reversal in congruent and stoichiometric lithium tantalite”, total pp. 3,; Institute of Physics and Appl Mathematics, Ural State University, Russia; National Institute for Research in Inorganic Material, Tsukuba, Japan.
Kenji Kitamura, et al., “Crytal growth and low coercive field 180 degrees domain switching characteristics of stoichiometric LiTaO3”, Appl Physics Letters, pp. 3073-3075, vol. 73, No. 21, Nov. 23, 1998; Nat'l Institute for Research in Inorganic Materials, Tsukuba, Japan; NGK Spark Plug Co., Komaki, Japan; Center for Materials Science, Los Alamos Nat'l Laboratories, New Mexico.
Galambos Ludwig
Lazar Janos
Miller Gregory D.
Risk Gabriel
Anderson Matthew
Norton Nadine G.
Okamoto & Benedicto LLP
Silicon Light Machines Corporation
LandOfFree
Method and apparatus for adjusting lithium oxide... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method and apparatus for adjusting lithium oxide..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for adjusting lithium oxide... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3416826