Method and apparatus for absolute interferometric testing of pla

Details Method and apparatus for absolute interferometric testing of pla Method and apparatus for absolute interferometric testing of pla

1991-01-31

1992-04-21

Turner, Samuel A.

Optics: measuring and testing

By polarized light examination

With birefringent element

356359, 356371, G01B 902

Patent

active

051061945

ABSTRACT:
A relatively simple interferometric method for the absolute testing of plane surfaces is disclosed, along with special apparatus for carrying out the inventive method. Two plane surfaces to be tested (A.sub.6,B.sub.6) are inserted simultaneously into the interferometer's measuring-beam path so that the measuring beam is reflected from each plane surface at two respective and different incident angles (.alpha., .beta.). During successive steps, the plane surfaces (A.sub.6,B.sub.6) are angularly repositioned and shifted so that at least one of the incident angles (.alpha., .beta.) is changed. Interferograms are recorded during each step and analyzed mathematically.

REFERENCES:
patent: 4859061 (1989-08-01), Inoue
"Ein Interferenzverfahren zur Absolutprufungvon Planflachennormalen I", by J. Schwider, G. Schulz, R. Riekher and G. Minkwitz, "Optical Acta", vol. 13, Issue 2, pp. 103-119 (1966).
"Ein Interferenzyerfahren zur Absolutprufung von Planflachennormalen II", by J. Schwider, "Optica Acta", vol. 14, Issue 4, pp. 389-400 (1969).
"Absolute Calibration of an Optical Flat", by Bernard S. Fritz, "Optical Engineering", vol. 23, No. 4, pp. 379-383, (Jul.-Aug. 1984).
"Absolute Measurement of Flat Mirrors in the Ritchey-Common Test", by F. M. Kuchel, from "Summaries of Papers Presented at the Optical Fabrication and Testing Workshop", Seattle, Washington, pp. 114-119, (Oct. 21-23, 1986).

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