Method and apparatus for ablating high-density array of vias...

Optical: systems and elements – Holographic system or element – Using a hologram as an optical element

Reexamination Certificate

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Details

C359S017000, C219S121680, C219S121690, C219S121700, C219S121820, C264S400000, C216S017000

Reexamination Certificate

active

06310701

ABSTRACT:

FIELD OF THE INVENTION
The present invention relates to a system for burning, drilling, or otherwise forming one or more desired vias, blind vias or other surface indentations, indicia, markings and/or formations in a surface of a desired object, such as a substrate.
BACKGROUND OF THE INVENTION
There are currently available a variety of systems for forming a hole, a via, a blind via or some other surface indentation in an exterior surface of an object, but many of these systems are very expensive to purchase and operate at relatively slow production rates. The present invention seeks to overcome the above noted drawbacks of the prior art by providing a system which is relatively inexpensive to purchase and maintain while, at the same time, operates at increased production speeds so that the desired vias, blind vias, or other surface indentations, apertures or markings can be achieved in a surface of a desired object during a shorter period of production time.
SUMMARY OF THE INVENTION
It is the object of the present invention to provide a method and apparatus for ablating a desired high-density array or pattern of vias or other surface indentations or formations in a surface of an object to be processed.
Another object of the invention is to facilitate use of a variety of different lasers which operate at different wavelengths and pulse durations, to minimize the associated costs in connection with ablating a high-density array of blind vias, vias or other surface indentations or formations in a surface of an object to be processed. It is to be appreciated that an ultraviolet, a visual, an infrared as well as other types of lasers, extending across the entire spectrum, could be utilized in accordance with the teaching of the present invention.
Yet another object of the present invention is to provide a method and apparatus which allows the number of vias or other indentations or formations, to be formed in a surface of an object being processed, to be easily varied during production of the same by control of a substantially collimated beam emanating from the laser.
Still another object of the invention is to provide an apparatus which is relatively less inexpensive to purchase and operate, in comparison to other known systems, while still improving the production rates of the objects to be processed.


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N.A. Vainos et al., “Excimer laser use for microetching computer-generated holographic structures”, Applied Optics, 35(320, pp. 6304-6319, Nov. 1996.

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