Photocopying – Projection printing and copying cameras – Detailed holder for original
Reexamination Certificate
2005-01-25
2005-01-25
Kim, Peter B. (Department: 2851)
Photocopying
Projection printing and copying cameras
Detailed holder for original
C355S030000, C355S053000, C430S005000
Reexamination Certificate
active
06847434
ABSTRACT:
A method and apparatus for maintaining a purged optical gap between a pellicle and a reticle in a photolithography system. A frame between a reticle and a pellicle maintains the purged optical gap. The frame defines first and second opposing surfaces. The first opposing surface defines a first opening, and is configured to mate with the pellicle. The second opposing surface defines a second opening, and is configured to mate with the reticle to enclose the optical gap between the pellicle and the reticle. At least one edge of the frame has an opening therethrough. A porous sintered material fills each opening through an edge of the frame.
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Ivaldi Jorge
Laganza Joseph
Luo Florence
ASML Holding N.V.
Kim Peter B.
Sterne Kessler Goldstein & Fox P.L.L.C.
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