Method and apparatus for a fast internal logic check of integrat

Details Method and apparatus for a fast internal logic check of integrat Method and apparatus for a fast internal logic check of integrat

1981-12-23

1984-10-16

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

250310, 324158D, 371 15, G01R 3126, G01N 2300

Patent

active

044777752

ABSTRACT:
A method and apparatus for conducting a fast internal logic check of integrated circuits whereby the operations on all data lines of a data bus can be simultaneously represented employ a pulsed electron beam as a measuring probe, a scan generator for changing the position of the measuring probe, an evaluator for the potential-contrast signal, a computer or logic analyzer for evaluating the measured values, and a sequence control device for controlling the sequence of operation of the method and device. Given a fixed phase relation of the program cycle of the integrated circuit to be checked, the pulsed electron beam is successively directed to different test locations and the potential-contrast signal for each test location is registered and logically evaluated. The test results gained at the various phase relations are relayed to the logic analyzer and evaluated therein.

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