Method and apparatus for 2-d spatially resolved optical...

Details Method and apparatus for 2-d spatially resolved optical... Method and apparatus for 2-d spatially resolved optical...

2005-10-25

2005-10-25

Le, Que T. (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

C250S216000

Reexamination Certificate

active

06958484

ABSTRACT:
A multi-point detection method and system for analyzing a composition within an examination area. The system simultaneously acquires multi-dimensional distributions (e.g., two- or three-dimensional distributions) of plasma optical emissions at at least two wavelengths. Such diagnostics are useful for real-time spatially-resolved measurements of plasma electron temperature distributions and/or chemical species concentrations within a plasma processing chamber (50). Generally, the system analyzes/diagnoses the measurement of line-of-sight light emission or absorption in the plasma.

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