Optics: measuring and testing – With plural diverse test or art
Patent
1997-11-04
1999-10-19
Evans, F. L.
Optics: measuring and testing
With plural diverse test or art
356381, 25055927, 216 60, G01B 1100, G01B 1106
Patent
active
059698055
ABSTRACT:
A method and apparatus for endpoint detection for the stripping of a particular material, such as photo-resist material, from a substrate surface. A beam of light is projected onto the substrate surface and the fluoresced and/or reflected light intensity at a particular wavelength band is measured by a light detector. The light intensity is converted to a numerical value and transmitted electronically to a control mechanism which determines the proper disposition of the substrate. The control mechanism controls the cessation of the stripping process and may control a substrate-handling device which sequentially transfers substrates to and from a stripping chamber.
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Hatfield Robert J.
Johnson David R.
Nielsen Todd C.
Phillips Joe Lee
Evans F. L.
Micro)n Technology, Inc.
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