Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Patent
1985-07-03
1988-05-31
LaRoche, Eugene R.
Radiant energy
Photocells; circuits and apparatus
Optical or pre-photocell system
356376, G01N 2188
Patent
active
047483350
ABSTRACT:
A system for determining surface profiles of specimens such as semiconductor wafers includes a drive for mounting the wafer for oscillatory movement along a line and an optical imaging system overlying the wafer for focusing a beam on a small sport on the wafer and including a photodetector for detecting the reflected sport from the wafer. The spot is scanned along the line on the wafer while the focal depth of the imaging system is progressively changed while the photodetector and connected digital circuitry generate a plurality of spaced output signals for each scan along the line so that data comprised of a series of spaced signals are provided at a plurality of focus levels extending through the surface profile of the wafer. Computer means are provided for analyzing the data and providing a graphical output of the surface profile.
REFERENCES:
patent: T102104 (1982-08-01), Kirk et al.
patent: 4112309 (1978-09-01), Nakazawa et al.
patent: 4194127 (1980-03-01), Schmidt
patent: 4198571 (1980-04-01), Sheppard
patent: 4350884 (1982-09-01), Vollath
patent: 4473750 (1984-09-01), Oshida et al.
patent: 4505585 (1985-03-01), Yoshikawa et al.
patent: 4600832 (1986-07-01), Grund
Ichioka et al., "Digital Scanning Laser Microscope", Applied Optics, vol. 24, No. 5, pp. 691-696, 1 Mar. 1985.
Hamilton et al., "Surface Profile Measurement Using the Confocal Microscope", Journal of Applied Physics, vol. 53, No. 7, pp. 5320-5322, Jul. 1982.
Marsman et al., "Mechanical Scan System for Microscopic Applications", RCU. Sci. Instrum., vol. 54, No. 8, pp. 1047-1052, Aug. 1983.
Brakenhoff et al., "Confocal Scanning Light Microscopy with High Aperture Immersion Lenses", J. Microsc., vol. 117, pp. 219-232 (1979).
Brakenhoff, "Imaging Modes in Confocal Scanning Light Microscopy (CSLM)", J. Microsc., vol. 117, pp. 233-242 (1979).
Bennett Simon D.
Lindow James T.
Smith Ian R.
Kelly Robert S.
LaRoche Eugene R.
Pascal Robert J.
SiScan Systems, Inc.
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