Method and an element for surface polishing

Details Method and an element for surface polishing Method and an element for surface polishing

2006-08-15

2006-08-15

Nguyen, Dung Van (Department: 3723)

Abrading

Abrading process

Side face of disk

C451S041000

Reexamination Certificate

active

07090567

ABSTRACT:
A surface polishing method in which a workpiece having at least one surface for polishing is set into rotation and has said surface pressed against a polishing element that is driven with motion in rotation or in translation, wherein said surface of the workpiece presents points that are situated outside a circumference of center coinciding with the center of rotation of the workpiece and traveling, during one revolution of said workpiece, along a path comprising first and second portions, with the rate of polishing over said second portion being smaller than over said first portion, in such a manner as to compensate for an over-polishing effect that occurs on the edge of said workpiece over said first portion of the path.

REFERENCES:
patent: 2998680 (1961-09-01), Lipkins
patent: 6168508 (2001-01-01), Nagahara et al.
patent: 6251785 (2001-06-01), Wright
patent: 6290578 (2001-09-01), Bowman et al.
patent: 6857941 (2005-02-01), Emami et al.
patent: 2001/0000497 (2001-04-01), Epshteyn et al.
patent: WO 01/27350 (2001-04-01), None

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