Method and algorithm for the control of critical dimensions...

Details Method and algorithm for the control of critical dimensions... Method and algorithm for the control of critical dimensions...

2006-12-20

2009-02-17

Kosowski, Alexander J (Department: 2128)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S119000, C438S014000

Reexamination Certificate

active

07493186

ABSTRACT:
A method of controlling one or more critical dimension (CD) features, dependent upon at least a first and a second processing parameter, with a single metrology step, while still enabling decoupled feedback to the first and the second processing parameter, includes an initial process characterization; producing a production piece; a single metrology step to determine the critical dimensions of the produced features; solving a system of equations simultaneously for individual feedback correction values for the first and second processing parameters; and applying the individual feedback correction values to their respective processing parameters.

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