Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2005-04-26
2005-04-26
Dang, Hung Xuan (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S292000, C359S295000
Reexamination Certificate
active
06885493
ABSTRACT:
The present invention relates to a movable micro-element with reduced imprinting or hysteresis effect arranged spaced apart from a surface comprising at least one electrode. At least one restoring element is connected to said movable micro-element. An address electrode is arranged on said surface and capable to electrostatically attract said movable micro-element. Said address electrode is addressed to a first potential. Said movable micro-element is first set to a second potential defining a non addressed state and at a time period Δt before a predetermined pulsed signal is emitted said movable micro-element is switched from said second potential to a third potential defining an addressed state. Said movable micro-element is kept in said addressed state for a time period of Δt+Δt′. The invention also relates to a Spatial Light Modulator (SLM), an apparatus for patterning a workpiece and a method of reducing an imprinting or hysteresis effect of a movable micro-element.
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Dürr Peter
Lakner Hubert Karl
Ljungblad Ulric
Beffel, Jr. Ernest J.
Dang Hung Xuan
Haynes Beffel & Wolfeld LLP
Micronic Lasersystems AB
Tra Tuyen
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