Method a quartz sensor

Details Method a quartz sensor Method a quartz sensor

2006-02-21

2006-02-21

Tugbang, A. Dexter (Department: 3729)

Metal working

Electric condenser making

C029S025350, C029S594000, C029S832000, C216S002000, C310S361000

Reexamination Certificate

active

07000298

ABSTRACT:
A quartz sensor method and system are disclosed in which a plurality of SAW sensing resonators can be mechanically simulated for implementation upon a quartz wafer substrate. The quartz wafer substrate can thereafter be appropriately etched to produce a quartz diaphragm from the quartz wafer substrate. A plurality of SAW sensing resonators (e.g., pressure, reference and/or temperature SAW resonators) can then be located upon the quartz wafer substrate, which is based upon the previously mechanically simulated for implementation upon the substrate to thereby produce a quartz sensor package from the quartz wafer substrate.

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