Organic compounds -- part of the class 532-570 series – Organic compounds – Heterocyclic carbon compounds containing a hetero ring...
Reexamination Certificate
2006-05-09
2006-05-09
Pezzuto, Helen L. (Department: 1713)
Organic compounds -- part of the class 532-570 series
Organic compounds
Heterocyclic carbon compounds containing a hetero ring...
C549S295000
Reexamination Certificate
active
07041838
ABSTRACT:
A (meth)acrylate represented by the following formula (1):wherein each of R1, R2, R3and R4represents a hydrogen atom, a methyl group or an ethyl group; either one of X1or X2represents a (meth)acryloyloxy group and the other represents a hydrogen atom; both A1and A2represent hydrogen atoms, or A1and A2form —O—, —CH2— or —CH2CH2—, which can be produced by first producing a lactone by reducing an addition product obtained by the Diels-Alder reaction between1,3-diene and maleic anhydride, and then hydrating the lactone to produce an alcohol followed by (meth)acrylation of the alcohol; a polymer produced by (co)polymerizing a monomer composition comprising the (meth)acrylate of the present invention is excellent in transparency, dry etching resistance, and solubility in organic solvents, and so it is preferably used as a resin for a chemically amplified resist composition.
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Fujiwara Tadayuki
Kamon Yoshihiro
Koizumi Atsushi
Kuwano Hideaki
Momose Hikaru
Mitsubishi Rayon Co. Ltd.
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
Pezzuto Helen L.
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