Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1989-08-07
1992-03-24
Turner, Samuel
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
25023116, 250237G, G01B 902
Patent
active
050981900
ABSTRACT:
A metrology system includes means for generating an interference fringe pattern as a function of a parameter to be measured, transducer apparatus for simultaneously generating three intensity-modulated optical signals, I.sub.R, I.sub.S and I.sub.T, that are related to the interference fringe pattern; signal processing apparatus for accurately determining an aspect of the interference fringe pattern from the three signals; means for accumulating phase information proportional to the aspect of the interference fringe pattern; and means for converting the accumulated phase and aspect information to desired outputs indicative of the parameter to be measured.
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Hercher Michael
Wijntjes Geert J.
Optra, Inc.
Turner Samuel
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