Metalorganic chemical vapor deposition of superconducting oxide

Superconductor technology: apparatus – material – process – Processes of producing or treating high temperature... – Using an organometallic intermediate

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505446, 505445, 505473, 505480, 505734, 427 62, 4271263, 4272552, 4272553, 427314, 427586, C23C 1600, B05D 512

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054479096

ABSTRACT:
A superconducting thin oxide film is formed by the steps of mixing a gas of the organometal compound of the alkali earth metal, a gas of at least one organometal compound of the element of the group IIIa and/or a halogenide thereof, and a gas of at least one organometal compound of a transition metal and/or a halogenide thereof, with an inert gas, to produce a gas mixture; mixing an oxygen-containing gas to said gas mixture to produce a gas mixture having a predetermined oxygen partial pressure; and thermally decomposing said gas mixture having the predetermined oxygen partial pressure on a substrate to form a thin film of a complex oxide on said substrate.

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