Metallo-oxomeric scrubber compositions

Details Metallo-oxomeric scrubber compositions Metallo-oxomeric scrubber compositions

1996-05-29

1998-07-07

Bos, Steven

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

From heavy metal or aluminum reactant having at least one...

528 27, 528395, 556 49, 556 55, 556 62, 423326, 4235192, 4234191, 423210, 502401, 502406, C01G 6700

Patent

active

057770581

ABSTRACT:
Scavengers for removing acidic or corrosive gaseous components from semiconductor process effluents comprising a metallic macromer comprising a coordinated complex of (i) metal coordination atoms linked to (ii) oxomeric moieties selected from the group consisting of carbonate, sulfite, carboxylate, and silicate, and methods for synthesizing these scavengers. A method for cleaning an exhaust gas containing least one corrosive or acidic gaseous component selected from the group consisting of hydrogen halide, chlorine, boron trihalide, thionyl chloride, and tungsten hexafluoride, which comprises contacting the exhaust gas with the metallic macromer scavenger compositions.

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