Metal working – Method of mechanical manufacture – Electrical device making
Patent
1984-06-11
1987-05-12
Hearn, Brian E.
Metal working
Method of mechanical manufacture
Electrical device making
29578, 29580, 148DIG17, 148DIG19, 357 67, 357 71, 427 89, 156657, H01L 21283
Patent
active
046638202
ABSTRACT:
A metallizing system for silicon surfaces consists solely of two layers of nickel and silver, respectively. Approximately 2 microns of the underlying silicon surface is removed prior to metallization to ensure removal of an oxygen-saturated layer of silicon before the nickel layer is deposited. The assembly is heated sufficiently that the nickel layer forms a nickel-silicide layer at the silicon surface. The metallizing adheres to the bare treated silicon but does not adhere to adjacent oxide coatings and easily lifts off of oxide-coated surfaces. The metallizing is solderable, makes ohmic contact to the silicon, regardless of its conductivity type and survives subsequent alloy processing temperatures.
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Hearn Brian E.
International Rectifier Corporation
Quach Tuan
LandOfFree
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