Metallized oxide structure and fabrication

Details Metallized oxide structure and fabrication Metallized oxide structure and fabrication

1997-02-27

1999-07-20

Ledynh, Bot L.

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

361305, 361303, 361313, 361322, 257295, H01G 406, H01G 4005, H01G 4008

Patent

active

059263601

ABSTRACT:
A structure for providing an interface with an oxide surface which exhibits both high adhesion and preferred electrical properties. An embodiment includes a capacitor structure having one or two electrodes abutting a high dielectric thin film, whereby the electrodes comprise first partial layers of metal having favorable electrical properties and second continuous layers adjacent the first partial layers, with the second layer material having been chosen for its physical properties, and wherein the second material adheres to exposed areas of the thin film through openings in the partial metal layer.

REFERENCES:
patent: 4413252 (1983-11-01), Tyler et al.
patent: 5217597 (1993-06-01), Moore et al.
patent: 5220483 (1993-06-01), Scott
patent: 5466964 (1995-11-01), Sakao et al.

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