Metallization process

Details Metallization process Metallization process

1979-07-09

1981-03-17

Newsome, John H.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427251, B05D 306

Patent

active

042567807

ABSTRACT:
Energetic particles modify favorably deposits from sources as evaporant to yield films that have a reduction in tension or even are in compression and with metals as chromium, an increase in reflectance. Only relatively few energetic particles are required to bring about desired change.

REFERENCES:
patent: 2424043 (1947-07-01), Meyer
patent: 2465713 (1949-03-01), Dimmick
patent: 2799600 (1957-07-01), Scott
patent: 3528387 (1970-09-01), Hamilton
patent: 3904505 (1975-09-01), Aisenberg
patent: 3961103 (1976-06-01), Aisenberg
EerNisse "J. App. Physics" vol. 48, #8, Aug. 1977, pp. 3337-3341.
Hoffman et al., "Thin Solid Films" vol. 45 (1977), pp. 387-396.
Aisenberg et al., "J. Vac. Sci. Technol.," vol. 10, #1 Jan./Feb. 1973 pp. 104-107.

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