Fishing – trapping – and vermin destroying
Patent
1991-01-07
1992-12-22
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437189, 437190, 148DIG20, 257758, H01L 2100, H01L 2102, H01L 2128, H01L 2148
Patent
active
051734494
ABSTRACT:
An improved process is described for depositing TiW/TiWN/TiW/Au metallization which provides superior adhesion properties, excellent barrier properties and which is suitable for use with metal line widths of the order of one micron or smaller. It is important in order to obtain these properties to ensure that the layer immediately underlying the gold layer by substantially pure TiW deposited in a nitrogen free sputtering atmosphere. To this end, the gas supply manifolds and deposition chamber are purged and the chamber evacuated following deposition of the TiW layer and prior to deposition of the TiWN layer underlying the gold layer. A final TiW layer is also conveniently placed on top of the gold layer to act as an etching mask.
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Burt Dan L.
Lorenzen Kevin A.
Shumate David A.
Everhart B.
Handy Robert M.
Hearn Brian E.
Jackson Miriam
Motorola Inc.
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