Measuring and testing – Specimen stress or strain – or testing by stress or strain... – Specified electrical sensor or system
Reexamination Certificate
2008-06-30
2009-11-17
Noori, Max (Department: 2855)
Measuring and testing
Specimen stress or strain, or testing by stress or strain...
Specified electrical sensor or system
C073S760000
Reexamination Certificate
active
07617736
ABSTRACT:
Thin metallic films are used as the piezoresistive self-sensing element in microelectromechanical and nanoelectromechanical systems. The specific application to AFM probes is demonstrated.
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Eickhoff et a
Li Mo
Roukes Michael L.
Tang Hongxing
California Institute of Technology
Foley & Lardner LLP
Noori Max
LandOfFree
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