Metal vapor deposition method and apparatus

Details Metal vapor deposition method and apparatus Metal vapor deposition method and apparatus

1984-10-09

1986-11-04

Childs, Sadie L.

Coating processes

Measuring, testing, or indicating

Thickness or uniformity of thickness determined

118665, 118724, 118725, 427 10, 427250, C23C 1606

Patent

active

046209840

ABSTRACT:
A method and an apparatus are provided for the production of a layer of a metallic material by deposition from the vapor phase onto an exposed surface of a collector. The exposed surface is maintained at a desired temperature by passing a heat transfer liquid through ducts within the collector and controlling the temperature of the liquid in accordance with the thickness of the deposited layer.

REFERENCES:
patent: 3015586 (1962-01-01), Toohig et al.
patent: 3654109 (1972-04-01), Hohl et al.
patent: 4051270 (1977-09-01), Butler
patent: 4151064 (1979-04-01), Kuehnle
patent: 4517027 (1985-05-01), Bickerdike et al.

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