Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2005-07-19
2005-07-19
Epps, Georgia (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S290000, C372S099000
Reexamination Certificate
active
06919984
ABSTRACT:
A device and a method of forming the device are disclosed. The device includes a reflector, a first dielectric layer disposed on the reflector, and a thin film resistor disposed on the reflector. The reflector acts as a barrier between the thin film resistor and an underlying dielectric layer which may have a non-uniform thickness. Thus, the thickness control and uniformity of the dielectric layer underlying the reflector does not affect the laser trimming of the thin film resistor. In addition to serving as a barrier, the reflector reflects the trimming laser energy back towards the thin film resistor, thereby improving the efficiency of the laser trimming of the thin film resistor. Furthermore, the thickness of the first dielectric layer situated below the thin film resistor and above the reflector can be easily controlled to substantially optimize the laser trimming efficiency of the thin film resistor.
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Robinson Karl
Wall Ralph N.
Blakely , Sokoloff, Taylor & Zafman LLP
Epps Georgia
Hasan M.
Maxim Integrated Products Inc.
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