Metal target for laser repair of dies

Details Metal target for laser repair of dies Metal target for laser repair of dies

1994-12-14

1997-12-09

Evans, F. L.

Optics: measuring and testing

By polarized light examination

With light attenuation

354401, G01B 1100

Patent

active

056965877

ABSTRACT:
Improved metal targets deposited on the surface of an IC chip for determining a reference coordinate in a laser repair apparatus for calculating the actual coordinates of a repair site in the shape of rectangular bars for occupying a smaller space on the surface of an integrated circuit chip and for enabling a simplified process for determining the actual coordinates.

REFERENCES:
patent: 5414519 (1995-05-01), Han

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