Metal/silicon contact and methods of fabrication thereof

Details Metal/silicon contact and methods of fabrication thereof Metal/silicon contact and methods of fabrication thereof

1979-08-31

1982-02-16

James, Andrew J.

357 15, 357 71, 357 65, H01L 2348, H01L 2946, H01L 2962

Patent

active

043162096

ABSTRACT:
Methods and resulting structures for thermally stable metal/silicon contacts are described. The resulting contacts are aluminum which is alloyed with at least one noble metal from the group of Pd and Pt wherein at least one region of the contact is further alloyed with silicon.

REFERENCES:
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patent: 3830657 (1974-08-01), Farrar
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patent: 4179534 (1979-12-01), Chang et al.
patent: 4224115 (1980-09-01), Nara et al.
patent: 4256513 (1981-03-01), Voshida et al.

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