Metal-semiconductor-field effect transistor (MESFET) with lightl

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357 15, 357 55, 357 91, H01L 2980

Patent

active

044255730

ABSTRACT:
A MESFET is disclosed wherein a gallium arsenide semiconductor material is doped. The doping magnitude differs in the source area, drain area, and in the gate area. An increase of the dielectric strength without an increase of parasitic resistances is provided. In the manufacture of the MESFET, shadowing techniques are employed to vary the doping magnitudes.

REFERENCES:
patent: 4002927 (1977-01-01), Nakamura et al.
patent: 4037169 (1977-07-01), Suzuki
patent: 4173764 (1979-11-01), DeCremoux
patent: 4212022 (1980-07-01), Beneking
patent: 4337473 (1982-06-01), Nishizawa

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