Metal seal flange assembly

Pipe joints or couplings – Particular interface

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285363, 285336, 285422, 285917, 285901, 138 89, F16L 2500

Patent

active

049881302

ABSTRACT:
A pair of flanges are fixed to a pipe end of a port of a plasma vacuum vessel and another pipe end to be connected thereto. These flanges each have a ring-shaped knife edge. A copper gasket is interposed between the respective knife edges of the two flanges. A predetermined number of bolts are tightened to fix the flanges to each other. As a result, the knife edges bite into the copper gasket, and a linear sealing load from the knife edges acts on the gasket, thereby sealing and isolating the space inside the port from the outside. The number n of bolts are given by

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patent: 3747963 (1973-07-01), Shivok
patent: 3989285 (1976-11-01), Yancey
patent: 4616860 (1986-10-01), Faria et al.
Journal of Vacuum Science Technology, A1(2), Apr.-Jun. 1983 (P220), "Thermal Cycling and Torque Analysis of an Ultrahigh Vacuum Flange", A. O. Fuente.
Proc. 7th Intern. Vac. Congr. & 3rd Intern. Conf. Solid Surfaces (Vienna 1977) "The H Type Metal Gasket and its Application", G. Horikoshi.
Conflat Flanges, "The Industry Standard for High and Ultrahigh Vacuum Flange Performance", Varian Corporation.

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