Metal-polishing liquid and chemical-mechanical polishing...

Compositions – Etching or brightening compositions

Reexamination Certificate

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C051S308000, C451S036000, C438S693000

Reexamination Certificate

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08034252

ABSTRACT:
A metal-polishing liquid includes colloidal silica and a compound represented by Formula (I) or a compound represented by Formula (II). The colloidal silica is substituted by aluminum atoms at least one portion of the silicon atoms on the surfaces thereof. In Formula (I), R1represents an alkyl group, alkynyl group, alkenyl group, allyl group or aryl group; R2represents hydrogen atom, an alkyl group, alkynyl group, alkenyl group, allyl group or aryl group; m represents an integer from 0 to 6. In Formula (II), R3represents an alkyl group or aryl group; n represents an integer from 1 to 30.in-line-formulae description="In-line Formulae" end="lead"?R1—OOC—(CH2)m—COO—R2  Formula (I)in-line-formulae description="In-line Formulae" end="tail"?in-line-formulae description="In-line Formulae" end="lead"?R3—O—(CH2CH2O)n—SO3H  Formula (II)in-line-formulae description="In-line Formulae" end="tail"?

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