Abrasive tool making process – material – or composition – With inorganic material
Reexamination Certificate
2005-11-28
2009-06-16
Marcheschi, Michael A (Department: 1793)
Abrasive tool making process, material, or composition
With inorganic material
C438S600000, C106S003000
Reexamination Certificate
active
07547335
ABSTRACT:
A metal polishing composition comprising at least one of the compound represented by formula (1) defined herein and the compound represented by formula (2) defined herein, and an oxidizing agent, and a chemical mechanical polishing method comprising bringing the metal polishing composition into contact with a surface to be polished and providing a relative movement between the surface to be polished and a polishing surface.
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European Search Report dated Feb. 23, 2007.
Akatsuka Tomohiko
Inaba Tadashi
Seki Hiroyuki
Yamashita Katsuhiro
FUJIFILM Corporation
Marcheschi Michael A
Parvini Pegah
Sughrue & Mion, PLLC
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