Metal oxide patterns with planar surface

Details Metal oxide patterns with planar surface Metal oxide patterns with planar surface

1982-04-12

1983-07-05

Massie, Jerome W.

Coating processes

Magnetic base or coating

Magnetic coating

156643, 156652, 156653, 156656, 156657, 1566591, 156664, 156665, 204 15, 204 32R, 204 38R, 204 38A, 204 42, 204 56R, 204192M, 427130, 427250, 427259, 427336, H01L 21308

Patent

active

043918492

ABSTRACT:
The subject invention relates to the fabrication of metal oxide patterns on a substrate adapted for use with thin film magnetic heads. The metal oxide pattern has a precisely defined geometry including nearly vertical side walls, for minimizing read/write errors. In addition, a filler material formed from a non-magnetic, non-metallic compound is provided on the substrate in a pattern complimentary to the metal oxide pattern. In accordance with the subject invention, the top surface of the metal oxide pattern and the filler material are co-planar. By this arrangement, subsequent layers may be uniformly deposited without discontinuities. The subject method includes a plurality of distinct masking and etching steps in order to achieve the desired result.

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