Metal oxide coatings

Details Metal oxide coatings Metal oxide coatings

1977-10-26

1978-07-25

Vertiz, O. R.

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

204298, C23C 1500

Patent

active

041027680

ABSTRACT:
A method and apparatus are disclosed for depositing transparent electrically-conductive metal oxide coatings or films, e.g. of indium/tin oxides, on non-conducting substrates, such as glass. The substrate may be a windscreen or window for an aircraft, on which the film provides an electrical resistance heating means for de-misting or de-icing. The film is reactively sputtered from a cathode assembly formed of substantially parallel strips of the metal, which is oscillated back and forth in a direction perpendicular to the length of the strips and substantially parallel to the substrate. Control of the thickness of the deposited film over the area of the substrate, e.g. for producing uniform heating over an irregular coated area of the substrate, is effected by bringing different effective areas of the cathode assembly over different parts of the substrate, by masking the cathode strips or by using a series of cathode strips which are tapered or which differ in width from one another.

REFERENCES:
patent: 4006070 (1977-02-01), King et al.

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