Coating processes – Coating by vapor – gas – or smoke – Metal coating
Patent
1981-11-18
1984-03-13
Childs, Sadie L.
Coating processes
Coating by vapor, gas, or smoke
Metal coating
4272552, 427314, C23C 1100, C23C 1300
Patent
active
044367694
ABSTRACT:
A method of depositing a group III element--group V element compound or alloy on a hot substrate using a metal organic chemical vapor deposition procedure. Attempts to apply an MOCVD procedure to the production of a group III element--group V element compound from alkyl derivatives of group III elements which are strong Lewis acids and group V element hydrides have met with limited success. This is because the reactants react in the cold gas phase to form an involatile polymer which does not give the required product on the hot substrate. The present invention proposes modifying the alkyl derivative of the group III element to be a weaker Lewis acid. This can be achieved by either substituting an electron donating group for one of the alkyl groups bonded to the group III element or by combining the group III element alkyl derivative with an alkyl derivative of a group V element thereby forming a volatile compound. Both the substituted alkyl derivative of the group III element and the volatile alkylated group III-V compound give the required product when used in admixture with a group V element hydride in an MOCVD process.
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Faktor Marc M.
Moss Rodney H.
British Telecommunications
Childs Sadie L.
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