Stock material or miscellaneous articles – Web or sheet containing structurally defined element or... – Physical dimension specified
Patent
1981-02-04
1982-12-21
Dixon, Jr., William R.
Stock material or miscellaneous articles
Web or sheet containing structurally defined element or...
Physical dimension specified
428458, 428460, 428461, 428464, 428469, 428472, 428702, 428697, 428698, B32B 1504, B32B 1508
Patent
active
043649955
ABSTRACT:
Most processes for the generation of metal oxide or metal sulfide films involved oxidation of existing metal layers or direct vapor deposition of the oxide or sulfide layer. These processes do not provide efficient control of film integrity, optical properties, and bonding. The use of a metal vapor deposition process in which a controlled amount of oxygen or sulfur containing gas or vapor is introduced into the metal vapor stream or portions enables formation of metal oxide or metal sulfide films with excellent control over the film properties.
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J. J. Hauser, "Electrical and Structural Properties of Amorphous Metal-Metal-Oxide Systems," Physical Review B, vol. 7, No. 7, pp. 4099-4100 (1972).
Crawford George H.
Downing Edward J.
Schlemmer Roy G.
Alexander Cruzan
Dixon Jr. William R.
Litman Mark A.
Minnesota Mining and Manufacturing Company
Sell Donald M.
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