Coating processes – Optical element produced
Patent
1982-10-20
1984-02-07
Hoffman, James R.
Coating processes
Optical element produced
427 42, 427164, 427166, 427251, C03C 1709, C03C 17245, C23C 1302, C23C 1304
Patent
active
044303661
ABSTRACT:
Most processes for the generation of metal oxide or metal sulfide films involved oxidation of existing metal layers or direct vapor deposition of the oxide or sulfide layer. These processes do not provide efficient control of film integrity, optical properties, and bonding. The use of a metal vapor deposition process in which a controlled amount of oxygen or sulfur containing gas or vapor is introduced into the metal vapor stream or portions enables formation of metal oxide or metal sulfide films with excellent control over the film properties.
REFERENCES:
patent: 3091548 (1963-05-01), Dillon
patent: 4148967 (1979-04-01), Satoh et al.
patent: 4166148 (1979-08-01), Sakurai
Hauser, "Electrical and Structural Properties of Amorphous Metal-Metal Oxide Systems," Physical Review 8, vol. 7, No. 7, pp. 4099-4100, (1972).
Crawford George H.
Downing Edward J.
Schlemmer Roy G.
Hoffman James R.
Litman Mark A.
Minnesota Mining and Manufacturing Company
Sell Donald M.
Smith James A.
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