Metal-metal epitaxy on substrates and method of making

Details Metal-metal epitaxy on substrates and method of making Metal-metal epitaxy on substrates and method of making

1990-05-25

1992-05-12

Zimmerman, John

Stock material or miscellaneous articles

All metal or with adjacent metals

Composite; i.e., plural, adjacent, spatially distinct metal...

428674, 428938, 428686, 156610, 156612, B32B 1520, C30B 2518

Patent

active

051126990

ABSTRACT:
Metal film and metal superlattice structures with controlled orientations are grown at room temperature using a silicon or germanium substrate coated with an epitaxially grown copper layer. The metal films are preferably deposited by electron beam evaporation without external heating of the copper coated substrate.

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