Metal-metal capacitor and method of making the same

Details Metal-metal capacitor and method of making the same Metal-metal capacitor and method of making the same

2008-07-09

2009-10-13

Ha, Nguyen T (Department: 2831)

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

C361S306100, C361S306300, C361S328000, C361S330000, C361S305000, C438S250000, C438S253000, C438S393000, C438S396000

Reexamination Certificate

active

07602599

ABSTRACT:
A method of making a metal-metal capacitor is disclosed, in which a first metal layer, a first dielectric layer, a second metal layer, a second dielectric layer, and a third metal layer are formed in the order over a substrate; an upper capacitor is defined by etching using a first mask, wherein the stop of the etching can be controlled; a lower capacitor is defined by etching using a second mask; and an anti-reflective third mask is formed to cover the surface, and the capacitor border and metal interconnect conductive wire are defined, so as to make a metal-metal capacitor with a stable structure in a wide process window.

REFERENCES:
patent: 6232197 (2001-05-01), Tsai
patent: 6468858 (2002-10-01), Lou
patent: 6836399 (2004-12-01), Lee et al.
patent: 6838717 (2005-01-01), Yen et al.
patent: 6977198 (2005-12-01), Gau
patent: 7038266 (2006-05-01), Wang
patent: 7329955 (2008-02-01), Tsau
patent: 7344941 (2008-03-01), Kim
patent: 2003/0197215 (2003-10-01), Coolbaugh et al.

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