Metal (IV) tetra-amidinate compounds and their use in vapor...

Details Metal (IV) tetra-amidinate compounds and their use in vapor... Metal (IV) tetra-amidinate compounds and their use in vapor...

2006-10-17

2009-12-29

Gonzalez, Porfirio Nazario (Department: 1621)

Organic compounds -- part of the class 532-570 series

Organic compounds

Heavy metal containing

C556S042000, C556S045000, C556S057000, C556S137000, C534S011000, C534S015000, C427S248100

Reexamination Certificate

active

07638645

ABSTRACT:
Metal(IV) tetrakis(N,N′-dialkylamidinates) were synthesized and characterized. Exemplary metals include hafnium, zirconium, tantalum, niobium, tungsten, molybdenum, tin and uranium. These compounds are volatile, highly stable thermally, and suitable for vapor deposition of metals and their oxides, nitrides and other compounds.

REFERENCES:
patent: 7002033 (2006-02-01), Sakai et al.
patent: WO-91/08322 (1991-06-01), None
patent: WO-2004/046417 (2004-06-01), None
patent: WO-2004/046417 (2004-06-01), None
Fix, et al., “Chemical Vapor Deposition of Titanium, Zirconium, and Hafnium Nitride Thin Films” , American Chemical Society, vol. 3(6), pp. 1138-1148, 1991.
International Search Report from PCT/US2007/014768, mailed Nov. 11, 2007.

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