Metal ion reduction in top anti-reflective coatings for photores

Details Metal ion reduction in top anti-reflective coatings for photores Metal ion reduction in top anti-reflective coatings for photores

1994-06-10

1996-05-14

Yoon, Tae

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Treating polymer containing material or treating a solid...

528490, 528499, 524462, 524463, 524556, 521 26, 430331, 430338, C08F 606, C08J 700, G03C 100

Patent

active

055168868

ABSTRACT:
The present invention provides methods for producing top anti-reflective coating compositions having a very low level of metal ions, utilizing specially treated ion exchange resins. A method is also provided for producing semiconductor devices using such top anti-reflective coating compositions.

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