Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – From phenol – phenol ether – or inorganic phenolate
Patent
1995-06-02
1996-12-03
Acquah, Samuel A.
Synthetic resins or natural rubbers -- part of the class 520 ser
Synthetic resins
From phenol, phenol ether, or inorganic phenolate
528129, 528142, 528144, 528147, 528165, 528486, 528487, 528490, 528499, 430311, 210634, 210638, C08G 804, B01D 1100
Patent
active
055809499
ABSTRACT:
The present invention provides methods for producing water insoluble, aqueous alkali soluble novolak resins having a very low level of metal ions, utilizing treated ion exchange resins. A method is also provided for producing photoresist composition having a very low level of metal ions from such novolak resins and for producing semiconductor devices using such photoresist compositions.
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Durham Dana L.
Rahman M. Dalil
Acquah Samuel A.
Hoechst Celanese Corporation
Sayko Jr. Andrew F.
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