Data processing: measuring – calibrating – or testing – Testing system – Including program set up
Reexamination Certificate
2005-04-12
2005-04-12
Tsai, Carol S. W. (Department: 2857)
Data processing: measuring, calibrating, or testing
Testing system
Including program set up
C324S537000, C324S763010
Reexamination Certificate
active
06879925
ABSTRACT:
Estimation related to void formation and breakage/failure is performed through numerical simulation using dominant parameters of EM damage in a metal interconnect. The metal interconnect is divided into elements. Current density and temperature distribution is obtained using numerical analysis. Atomic flux divergence AFDgenof each element and the distribution thereof is calculated by using material property constants determined through acceleration testing. The reduction of volume per one calculation step in the simulation is found by multiplying the volume of each element, the length of time corresponding to one calculation step, and the atomic volume corresponding to the calculated AFDgen. Based on the reduced amount of volume, the thickness of each element decreases. The elements having a decrease in thickness show the fact that voids have formed. The numerical analysis of the current density and temperature distribution in the metal interconnect is once again performed considering the thickness of each element.
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Japan Science and Technology Corporation
Rader & Fishman & Grauer, PLLC
Tsai Carol S. W.
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