Metal growth accelerator shell for the chemical vaporization dep

Details Metal growth accelerator shell for the chemical vaporization dep Metal growth accelerator shell for the chemical vaporization dep

1992-06-03

1994-04-26

Hearn, Brian E.

Coating apparatus

Gas or vapor deposition

118724, 118725, 156DIG68, H01L 2100

Patent

active

053063481

ABSTRACT:
The rate at which diamond is deposited by chemical vapor deposition on a substrate is increased by the presence of an expediting metal such as molybdenum in the surface of a wall exposed to the chemical vapor deposition.

REFERENCES:
patent: 4347431 (1982-08-01), Pearce et al.
patent: 4425315 (1984-01-01), Tsuji et al.
patent: 4707384 (1987-11-01), Schachner et al.
patent: 4953499 (1990-09-01), Anthony et al.
patent: 4958592 (1990-09-01), Anthony et al.
patent: 4982693 (1991-01-01), Ebato
patent: 4989543 (1991-02-01), Schmitt
"Handbook of Chemistry and Physics"; 61st ed. CRC Press; .COPYRGT.1981; Weast et al.; pp. E-12 to E-14.
Singh et al., Applied Physics Letters, 52, 451-452 (1988).

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