Metal film forming method

Details Metal film forming method Metal film forming method

1991-07-08

1993-05-04

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437245, 427124, 156DIG61, H01L 2144, H01L 21465, B05D 512

Patent

active

052081877

ABSTRACT:
A metal film forming method comprises steps of:

REFERENCES:
patent: 4725561 (1988-02-01), Haond et al.
patent: 4800179 (1989-01-01), Mukai
patent: 5091210 (1992-02-01), Mikochiba et al.
International Electron Device meeting; Dec. 1989, Wash. D.C. pp. 677-680.
1990 Symposium VLSI Technology, Apr.-Jul. 6, 1910, pp. 5-6, Tsubouchi, K. et al., "Selective and Nonselective Deposition of Aluminium by LPCVD using DMAH and Microregion Observation of Single Crystal Aluminium with Scanning Micro-RHEED Microscope".

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