Metal film and metal film-coated member, metal oxide film...

Details Metal film and metal film-coated member, metal oxide film... Metal film and metal film-coated member, metal oxide film...

2006-04-25

2006-04-25

Lavilla, Michael E. (Department: 1775)

Stock material or miscellaneous articles

All metal or with adjacent metals

Surface feature

C428S673000, C428S220000, C428S446000, C428S650000, C428S700000, C362S296040, C313S113000, C353S098000

Reexamination Certificate

active

07033679

ABSTRACT:
The metal film of the present invention is a dense film of a single crystal that has very low surface roughness and very good crystal orientation because an arithmetic mean roughness of the surface is not larger than 2 nm and a (111) peak intensity of X-ray diffraction is not less than 20 times the sum of all other peaks. Also the metal oxide film of the present invention is a dense film that includes less oxygen defects and almost no voids therein because a content of a non-oxidized metal is not higher than 1 mole % of a metal component that constitutes the metal oxide and a packing density is 0.98 or higher.

REFERENCES:
patent: 6063513 (2000-05-01), Tanino
patent: 6372369 (2002-04-01), Ito et al.
patent: 6515297 (2003-02-01), Takeda et al.
patent: 6562183 (2003-05-01), Yamada et al.

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