Metal-containing polymer and production process thereof

Details Metal-containing polymer and production process thereof Metal-containing polymer and production process thereof

1990-03-26

1991-06-25

Prescott, Arthur C.

Organic compounds -- part of the class 532-570 series

Organic compounds

Heavy metal containing

556 9, 556 12, 556 87, 556410, 556413, C07F 722, C07F 724, C07F 702, C07F 730

Patent

active

050268872

ABSTRACT:
A metal-containing polymer represented by the general formula: ##STR1## where M represents a group IV metal atom, X represents N(SiR.sup.1 R.sup.2 R.sup.3).sub.2 or N(R.sup.4)SiR.sup.1 R.sup.2 R.sup.3, each of R.sup.1, R.sup.2, R.sup.3 and R.sup.4 represents an alkyl group or aryl group, Ar represents a (substituted) phenylene, (substituted) naphthylene or (substituted) anthrylene group, and n represents an integer of 2 to 5000.
The polymer can be produced by the oxidation-reduction alternating copolymerization using a reductant monomer represented by MX.sub.2 as and substituted-benzoquinones, -naphthoquinones or -anthraquinones as the oxidant monomer.
The polymer is solvent-soluble and can be used as functional materials such as resist materials, electronic materials, etc.

REFERENCES:
patent: 4058400 (1977-11-01), Crivello
patent: 4119614 (1978-10-01), King et al.
patent: 4260552 (1981-04-01), Strunk et al.
patent: 4654368 (1987-03-01), Sakamoto et al.

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