Organic compounds -- part of the class 532-570 series – Organic compounds – Heavy metal containing
Reexamination Certificate
2006-07-28
2010-10-19
Gonzalez, Porfirio Nazario (Department: 1621)
Organic compounds -- part of the class 532-570 series
Organic compounds
Heavy metal containing
C556S001000, C556S176000, C427S250000, C427S255190
Reexamination Certificate
active
07816549
ABSTRACT:
A compound which has thermal stability and moderate vaporizability and is satisfactory as a material for the CVD or ALD method; a process for producing the compound; a thin film formed from the compound as a raw material; and a method of forming the thin film. A compound represented by the general formula (1) is produced by reacting a compound represented by the general formula (2) with a compound represented by the general formula (3). The compound produced is used as a raw material to form a metal-containing thin film. [Chemical formula 1] (1) [Chemical formula 2] (2) [Chemical formula 3] Mp(NR4R5)q(3) (In the formulae, M represents a Group 4 element, aluminum, gallium, etc.; n is 2 or 3 according to cases; R1and R3each represents C1-6alkyl, etc.; R2represents C1-6alkyl, etc.; R4and R5each represents C1-4alkyl, etc.; X represents hydrogen, lithium, or sodium; p is 1 or 2 according to cases; and q is 4 or 6 according to cases).
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Chinese Office Action issued Apr. 13, 2010 in Chinese application No. 200680029033.2.
Furukawa Taishi
Inaba Koichiro
Oshima Noriaki
Tada Ken-ichi
Yamakawa Tetsu
Gonzalez Porfirio Nazario
Sagami Chemical Research Center
Sughrue & Mion, PLLC
Tosoh Corporation
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