Organic compounds -- part of the class 532-570 series – Organic compounds – Rare earth containing
Patent
1994-01-18
1995-09-26
Wu, Shean
Organic compounds -- part of the class 532-570 series
Organic compounds
Rare earth containing
505100, 505120, 505121, 505125, 546259, C06F 500, H01B 1200, C07D21322
Patent
active
054534941
ABSTRACT:
Metal organic chemical vapor deposition (MOCVD) source reagents useful for formation of metal-containing films, such as thin film copper oxide high temperature superconductor (HTSC) materials. The source reagents have the formula MAyX wherein: M is a metal such as Cu, Ba, Sr, La, Nd, Ce, Pr, Sm, Eu, Th, Gd, Tb, Dy, Ho, Er, Tm Yb, Lu Bi, Tl, Y or Pb; A is a monodentate or multidentate organic ligand; y is 2 or 3; MAy is a stable sub-complex at STP conditions; and X is a monodentate or multidentate ligand coordinated to M and containing one or more atoms independently selected from the group consisting of atoms of the elements C, N, H, S, O, and F. The ligand A may for example be selected from beta-diketonates, cyclopentadienyls, alkyls, perfluoroalkyls, alkoxides, perfluoroalkoxides, and Schiff bases. The complexes of the invention utilize monodentate or multidentate ligands to provide additional coordination to the metal atom, so that the resulting complex is of enhanced volatility characteristics, and enhanced suitability for MOCVD applications.
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Brown Duncan W.
Gardiner Robin A.
Kirlin Peter S.
Advanced Technology & Materials Inc.
Elliott Janet R.
Hultquist Steven J.
Wu Shean
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